Brooks Instrument SLA5850S Gas Mass Flow Controller
Discover the Brooks Instrument SLA5850S, a high-precision digital mass flow controller for Nitrogen (N2) gas. This unit offers a 5 slpm full-scale flow rate, 0-5V analog control, and a robust 1500 psig pressure rating for reliable performance.
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Brooks Instrument SLA5850S Gas Mass Flow Controller
The Brooks Instrument SLA5850S is a high-performance digital mass flow controller from the DELTA II Smart Mass Flow series, engineered for precision and reliability in critical gas flow control applications. Renowned for its exceptional accuracy, stability, and fast response time, the SLA5850S provides repeatable gas delivery for industries such as semiconductor manufacturing, biotechnology, and research and development. This specific model is pre-configured for Nitrogen (N2) gas, offering precise control up to a full-scale flow rate of 5 slpm. Its robust design, rated for up to 1500 psig, ensures safe and consistent operation even in demanding high-pressure environments.
Technical Specifications:
- Model: SLA5850S
- Series: DELTA II Smart Mass Flow
- Configured Gas: Nitrogen (N2)
- Full Scale Flow Rate: 5 slpm (Standard Liters Per Minute)
- Maximum Inlet Pressure: 1500 psig (104 bar)
- Analog I/O Signal: 0-5 VDC
- Power Requirement: +24 VDC
- Reference Temperature: 21.1°C

| Brand | Brooks Instrument |
|---|---|
| Model | SLA5850S |
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