HORIBA STEC D852-LVCT Digital Mass Flow Module
The HORIBA STEC D852-LVCT Criterion Digital Mass Flow Module is a highly precise and reliable gas flow control solution engineered for advanced semiconductor manufacturing and demanding industrial applications. Specifically calibrated for Diethylzinc ((C2H5)2Zn) gas, this module delivers an accurate and stable flow rate of 700 SCCM. It features a robust Type C valve and specialized SUC surface treatment to ensure optimal purity and enhanced corrosion resistance. Equipped with standard 8CRG fittings and supporting both F-NET and RS-485 communication protocols, the D852-LVCT allows for seamless digital integration into complex gas delivery networks. Manufactured in Japan, this mass flow controller guarantees the exceptional performance, accuracy, and durability required for critical process environments.
Technical Specifications:
- Brand: HORIBA STEC
- Model: D852-LVCT
- Gas Type: (C2H5)2Zn (Diethylzinc)
- Flow Rate: 700 SCCM
- Valve Type: C
- Surface Treatment: SUC
- Fitting: 8CRG
- Communication Protocol: F-NET, RS-485
- Option Code: 3018
- Country of Origin: Made in Japan
| Brand | HORIBA STEC |
|---|---|
| Model | D852-LVCT |
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Shipping policy
If you are buying multiple items, please contact us before checking out so we can get you the best combined rate for shipping.
Our default shipping rate is $100, which is enough to cover the cost of most shipments, but it is not our expected shipping rate. Due to the varying weights and sizes of products and customer locations, please contact us with your location and the products you are interested in to get the best current shipping rates.
ENERAL DELIVERY INFORMATION
Orders will be processed and shipping during standard working hours (0830 – 1700 GMT+8) Monday to Friday (excluding Bank Holidays)
On rare occasions, your order may be handled and/or processed on a Saturday. However, we are unable to ship items on weekends, therefore any orders dealt with on the weekend will be send out the next following working day.
The cut-off point for orders to be shipped the same day is 14:00 – please contact us to confirm stock levels before placing your order
Any orders placed after the cut-off will ship the next working day assuming all parts are in stock and ready for dispatch.
All orders:
- must be paid for in full before any goods are dispatched
- require a signature upon delivery. Please ensure delivery can be made to an address where someone will be available to sign for the delivery
- are packaged with great care, ensuring your order and the contents it contains, makes it safely through the delivery network
HORIBA STEC D852-LVCT Digital Mass Flow Module
Optimize your semiconductor gas delivery systems with the HORIBA STEC D852-LVCT Digital Mass Flow Module. Calibrated for (C2H5)2Zn (Diethylzinc) at 700 SCCM, this premium Japanese-made controller features F-NET/RS-485 protocols, 8CRG fittings, a Type C valve, and SUC treatment for maximum precision and reliability.
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