HORIBA STEC SEC-E40 Mass Flow Controller
The HORIBA STEC SEC-E40 is a highly reliable Mass Flow Controller (MFC) engineered for precise gas flow regulation in semiconductor manufacturing, vacuum coating, and advanced industrial processes. This specific unit is factory-configured for CHF3 (Trifluoromethane) gas with a full-scale flow rate of 200 SCCM. Equipped with a robust C-type valve and a standard D-sub connector interface, it ensures seamless integration and communication within complex gas delivery systems. The controller is calibrated using Nitrogen (N2) with a correction factor (C.F.) of 0.515 to guarantee exceptional flow accuracy and process stability. Manufactured in Japan and CE certified, the SEC-E40 delivers the uncompromising quality, repeatability, and durability characteristic of HORIBA STEC instrumentation.
Technical Specifications:
- Brand: HORIBA STEC
- Model: SEC-E40
- Target Gas: CHF3 (Trifluoromethane)
- Full Scale Flow Rate: 200 SCCM
- Calibration Base: N2 (Correction Factor: 0.515)
- Valve Type: C
- Connection Interface: D-sub connector
- MGS No. / Type No.: ARAH 3KCN / 000136
- Compliance: CE Marked
- Country of Origin: Made in Japan

| Brand | HORIBA STEC |
|---|---|
| Model | SEC-E40 |
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ENERAL DELIVERY INFORMATION
Orders will be processed and shipping during standard working hours (0830 – 1700 GMT+8) Monday to Friday (excluding Bank Holidays)
On rare occasions, your order may be handled and/or processed on a Saturday. However, we are unable to ship items on weekends, therefore any orders dealt with on the weekend will be send out the next following working day.
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Any orders placed after the cut-off will ship the next working day assuming all parts are in stock and ready for dispatch.
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HORIBA STEC SEC-E40 Mass Flow Controller
Shop the HORIBA STEC SEC-E40 Mass Flow Controller configured for CHF3 gas (200 SCCM). Features a C-type valve, D-sub interface, and N2 calibration (C.F. 0.515). Ideal for high-precision gas delivery in semiconductor and industrial manufacturing. Made in Japan.

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