MKS DLT2A213163R210 Delta II Flow Ratio Controller
The MKS DLT2A213163R210 Delta II Flow Ratio Controller is a high-performance instrument engineered for precise gas flow management and splitting in advanced manufacturing and semiconductor processes. Specifically calibrated for Nitrogen (N2) gas with a full-scale flow range of 1000 SCCM, this controller ensures exceptional accuracy and process repeatability. It features a reliable DeviceNet communication interface operating at a 250kb rate, utilizing both RJ45 and circular connector ports for flexible system integration. The physical interface includes dual flow inputs (labeled Flow 1 and Flow 2) and a main Flow Input port to accommodate complex gas delivery requirements. Additionally, the top panel provides user-friendly access to MSD and LSD address configuration dials, along with dedicated Network (NET) and Module (MOD) LED status indicators for real-time diagnostics. CE marked for international compliance, the Delta II FRC delivers the reliability required for critical flow control applications.
Technical Specifications:
- Brand: MKS Instruments
- Model: DLT2A213163R210 (Delta II Series)
- Target Gas: Nitrogen (N2)
- Flow Range: 1000 SCCM
- Communication Protocol: DeviceNet
- Data Rate: 250kb
- Interface Connections: RJ45 and Circular Connector Ports
- Port Configuration: Flow 1, Flow 2, and Main Flow Input
- Configuration & Diagnostics: MSD/LSD Address Dials, NET/MOD Status LEDs
- Certifications: CE Marked
| Brand | MKS |
|---|---|
| Model | DLT2A213163R210 |
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ENERAL DELIVERY INFORMATION
Orders will be processed and shipping during standard working hours (0830 – 1700 GMT+8) Monday to Friday (excluding Bank Holidays)
On rare occasions, your order may be handled and/or processed on a Saturday. However, we are unable to ship items on weekends, therefore any orders dealt with on the weekend will be send out the next following working day.
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Any orders placed after the cut-off will ship the next working day assuming all parts are in stock and ready for dispatch.
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MKS DLT2A213163R210 Delta II Flow Ratio Controller
Optimize your industrial gas delivery systems with the MKS DLT2A213163R210 Delta II Flow Ratio Controller. Calibrated for N2 gas at a 1000 SCCM range, this precision instrument features a 250kb DeviceNet interface, dual flow inputs, and easy-to-use rotary address dials for seamless integration into demanding semiconductor manufacturing processes.
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